Evaluation of the sp3/ sp2 ratio of DLC films by RF‑PECVD and its quantitative relationship with optical band gap

서지정보

ㆍ발행기관 : 한국탄소학회 ㆍ수록지정보 : Carbon letters / 31권 / 5호
ㆍ저자명 : Hongxun Sheng, Wenwen Xiong, Songsheng Zheng, Chao Chen, Song He, Qijin Cheng

목차

Abstract
1 Introduction
2 Experimental
2.1 Fabrication of DLC films by PECVD
2.2 Characterization of DLC films
3 Result and discussion
3.1 Morphologies characterization
3.2 Ultraviolet visible spectrophotometer analysis
3.3 X-ray photoelectron spectroscopy
3.4 Raman spectroscopy
3.5 Fourier transform infrared spectrum
4 Conclusions
Acknowledgements
References

영어 초록

DLC has been attractive as semiconductor materials for solar cell due to its biological friendliness, flexible microstructures, and especially its tunable band gap. In order to fabricate high-efficiency multiband gap solar cell, it is important to control the sp3/ sp2 bonds ratio of DLC film corresponding to optical band gap (Eg). There are many references reporting the relations among the fabrication conditions, Eg, sp3/ sp2, and ID/ IG. However, a more comprehensive database is needed for controllable fabrication. Especially, the quantitative relationship of sp3/ sp2 ratio to Eg of DLC film by PECVD is unclear. In this paper, 36 sets of DLC films were fabricated by RF-PECVD. Characterization methods of XPS, Raman spectroscopy, and IR absorption have been used to determine the sp3/ sp2 ratio of DLC films. UV/visible light absorption method has applied to evaluate Eg. The Eg obtained is in the range 1.45–3.0 eV. Our results agree well with the references. The XPS spectra gives a linear relationship as Eg = − 0.161 (± 0.136) + 26.095 (± 1.704) · {sp3 (XPS)/sp2}, the Raman spectra shows a linear function that Eg = 1.327 (± 0.046) + 0.428 (± 0.036) · (ID/IG), as well as the FTIR analysis demonstrates that Eg = − 0.492 (± 0.093) + 0.464 (± 0.044) · {sp3 (FTIR)/sp2}.

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