AES 원리
- 최초 등록일
- 2013.06.04
- 최종 저작일
- 2011.10
- 21페이지/
MS 파워포인트
- 가격 1,500원
![할인쿠폰받기](/images/v4/document/ico_det_coupon.gif)
목차
1. Auger Electron?
2. Energy of Auger Electron !
3. AES
4. Interaction Volume
5. Monte Carlo Simulation
6. Auger Electron Yield
7. AES Analysis
8. Quantity Analysis
9. Chemical Shift
10. AES Experimental Setup
11. Cylinderical Mirror Analyzer
12. Depth Profile
13. AES Analysis
14. Scanning
본문내용
AES
Incident particle Electron (or Ion or Photon)
Interaction Auger Process
Out put signal Auger electron
(X-ray, Back scattered electron, secondary electron)
Widely used technique to investigate the composition of surface
Depth profiling, Point Analysis, Image mapping
Interaction Volume
Incident Energy 3 ~ 30 keV
Back Scattered Electron
~ Incident Energy
Secondary Electron
Auger Electron
0.5 keV ~
X-ray
Monte Carlo Simulation
5 keV
10 keV
100 keV
# of simulated electron : 1000
Probe size : 10 nm
Beam current : 10-7 A
WinXray (Made by McGill University)
Auger Electron Yield
AES Analysis
참고 자료
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