Kinetic Spray 공정을 이용한 벌크형 탄탈륨 소재의 제조 및 미세조직/물성

서지정보

ㆍ발행기관 : 한국분말야금학회 ㆍ수록지정보 : 한국분말야금학회지 / 23권 / 1호
ㆍ저자명 : 이지혜, 김지원, 이기안

영어 초록

A bulk-type Ta material is fabricated using the kinetic spray process and its microstructure and physical properties are investigated. Ta powder with an angular size in the range 9-37 μm (purity 99.95%) is sprayed on a Cu plate to form a coating layer. As a result, ~7 mm-sized bulk-type high-density material capable of being used as a sputter material is fabricated. In order to assess the physical properties of the thick coating layer at different locations, the coating material is observed at three different locations (surface, center, and interface). Furthermore, a vacuum heat treatment is applied to the coating material to reduce the variation of physical properties at different locations of the coating material and improve the density. OM, Vickers hardness test, SEM, XRD, and EBSD are implemented for analyzing the microstructure and physical properties. The fabricated Ta coating material produces porosity of 0.11~0.12%, hardness of 311~327 Hv, and minor variations at different locations. In addition, a decrease in the porosity and hardness is observed at different locations upon heat treatment.

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